Today CCER PhD researcher Chidozie Onwudinanti succesfully defended his thesis On hydrogen penetration into ruthenium – The role of tin in blistering of EUV mirrors. Congratulations to the new doctor!

Thesis abstract
The reflectivity and operational lifetime of the ruthenium-capped multi-layer mirrors used in EUV lithography are reduced by the formation of blisters – hydrogen-filled bubbles under the ruthenium layer. These bubbles have been observed to form rapidly in the presence of tin, which may be deposited on the reflector surface from the laser-produced tin plasma in the EUV source. This dissertation proposes a mechanism via which tin facilitates the blistering of the mirrors, on the basis of atomistic modelling and simulation of ruthenium-hydrogen-tin interactions.

Dr. Onwudinanti's PhD thesis may be downloaded here (pdf).


About CCER

The Center for Computational Energy Research  aims to explore pathways to future energy systems. This is done via computational simulations that complement experimental energy research. The center was founded in 2017 as the result of a joint initiative between the Department of Applied Physics of the Eindhoven University of Technology and NWO Institute DIFFER.

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